In this case, an additional set of elements would be added to array 90, located in a plane perpendicular to the plane of incidence. This is due to the straylight lens 50 being capable of collecting scattered light at angles θs of approximately 30 degrees or smaller. The method uses a periodic target containing repetitive lines whose profile, i.e., its width, height, and shape, is to be determined. The most commonly used laser is a standard He-Ne type with radiation wavelength of 633 nm.

The measurement technique is efficient in that measurements of scattered light at all the different values of θs (i.e. Optical scatterometry, however, would be a good tool for non-destructive characterization, and in particular, for inline process control of the fabrication. This means that structure of spatial wavelength (lateral dimension) between approximately 70μ and 0.63μ can be detected using the arrangement illustrated in FIG. A common use is in-place monitoring of large difficult to move surfaces (such as telescope mirrors). Specifically, this causes difficulty in distinguishing between the specularly reflected beam and light which is scattered at small scatter angle θs.

microroughness of the surface as calculated from the PSD data. at each detector element of array 90) are performed simultaneously. 4 has an inherently lower level of system-scattered light (i.e. 1. It finds use in lab, field and manufacturing environments. Lastly, since there are no moving parts in the detector system, mechanical construction is greatly simplified. Extensions to the scatterometry technique need to be explored. An optical scatterometer can be employed in a number of manufacturing environments that require knowledge of surface microstructure.

The radius of the arc associated with array 90 is typically in the range of 5 to 50 cm. Referring now to FIG. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Signals from each electronic circuit would be monitored by a microprocessor 70 illustrated in FIG. These apertures block stray light that could originate from the lens 55. Once the sample is positioned in the holder, the signals from array 100 may be monitored to determine the location and direction of the specularly reflected beam. The wavelength used thus also limits the high spatial frequency (short lateral dimension measurement) capability of the system. This, in turn, contributes to the overall level of light scattered by the entire scatterometer system independent of the sample being investigated, and this scattered light is detected by the photodiode array. RELEASE;ASSIGNOR:FLEET NATIONAL BANK, AS AGENT;REEL/FRAME:013740/0119, Owner name: Second, the scatterometer must be capable of detecting scatter from microstructure within the range of spatial frequencies, or sizes, of interest. Therefore, the system is limited to measuring samples of r.m.s.

This is much greater than the r.m.s. For example, the method is primarily used to assess two-dimensional profiles.

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